Grayscale stencil lithography for patterning multispectral color filters
© 2020 Optical Society of America Flat optics for spatially resolved amplitude and phase modulation usually rely on 2D patterning of layered structures with spatial thickness variation. For example, Fabry–Perot-type multilayer structures have been applied widely as spectral filter arrays. However, i...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
The Optical Society
2021
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| Online Access: | https://hdl.handle.net/1721.1/138748.2 |