Microfabricated silicon electric mechanisms
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/14042 |
| _version_ | 1826204957550837760 |
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| author | Mehregany, Mehran |
| author2 | Stephen D. Senturia. |
| author_facet | Stephen D. Senturia. Mehregany, Mehran |
| author_sort | Mehregany, Mehran |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990. |
| first_indexed | 2024-09-23T13:04:17Z |
| format | Thesis |
| id | mit-1721.1/14042 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:04:17Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/140422019-04-10T18:36:30Z Microfabricated silicon electric mechanisms Mehregany, Mehran Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990. Includes bibliographical references (leaves 151-156). by Mehran Mehregany. Ph.D. 2005-08-10T19:16:55Z 2005-08-10T19:16:55Z 1990 1990 Thesis http://hdl.handle.net/1721.1/14042 23292188 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 181 leaves 11500595 bytes 11500351 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science. Mehregany, Mehran Microfabricated silicon electric mechanisms |
| title | Microfabricated silicon electric mechanisms |
| title_full | Microfabricated silicon electric mechanisms |
| title_fullStr | Microfabricated silicon electric mechanisms |
| title_full_unstemmed | Microfabricated silicon electric mechanisms |
| title_short | Microfabricated silicon electric mechanisms |
| title_sort | microfabricated silicon electric mechanisms |
| topic | Electrical Engineering and Computer Science. |
| url | http://hdl.handle.net/1721.1/14042 |
| work_keys_str_mv | AT mehreganymehran microfabricatedsiliconelectricmechanisms |