Microfabricated silicon electric mechanisms

Microfabricated silicon electric mechanisms

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.

Bibliographic Details
Main Author:	Mehregany, Mehran
Other Authors:	Stephen D. Senturia.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/14042

Similar Items

Application of micromachined structures to the study of mechanical properties and adhesion of thin films
by: Mehregany, Mehran
Published: (2005)

Geometric simulation of microfabricated structures
by: Harris, Robert Michael
Published: (2005)

Frequency-pulling effects in microfabricated resonant structures
by: Shirley, Timothy Earl
Published: (2005)

A microfabricated liquid mixer for biomedical applications
by: Voldman, Joel
Published: (2005)

A microfabricated dielectrophoretic micro-organism concentrator
by: Muller, Rikky, 1980-
Published: (2005)

Microfabricated fused silica flow chambers for flow cytometry
by: Sobek, Daniel
Published: (2005)

Rotation analysis of a microfabricated fatigue test structure
by: Gordon, Michael J., 1974-
Published: (2013)

A microfabricated solid oxide fuel cell
by: Mehta, Ankur, 1983-
Published: (2005)

Design of a silicon microfabricated rocket engine turbopump
by: Deux, Antoine, 1975-
Published: (2005)

Silicon carbide process development for microengine applications : residual stress control and microfabrication
by: Choi, Dongwon, 1973-
Published: (2005)

Using computer microvision to characterize the motions of a microfabricated gyroscope
by: Johnson, Laura Karine
Published: (2008)

Characterization of mechanical properties of microfabricated film
by: Khoo, Hwa Seng.
Published: (2008)

Optimizing wettability of externally wetted microfabricated silicon electrospray thrusters
by: Garza, Tanya Cruz
Published: (2007)

Development of a microfabricated silicon motor-driven compression system
by: Fréchette, Luc G. (Luc Guy)
Published: (2013)

Microfabricated pressure transducers based on anti-resonant reflecting optical waveguides
by: Young, Albert Min-Hsien
Published: (2005)

A microfabricated dielectrophoretic trapping array for cell-based biological assays
by: Voldman, Joel
Published: (2005)

A microfabricated hollow cantilever sensor for sub-nanoliter thermal measurements
by: Shusteff, Maxim, 1979-
Published: (2014)

Selective microorganism concentration using a dielectrophoresis-based microfabricated device
by: Puchała, Katarzyna Anna
Published: (2008)

Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)
by: Nayfeh, Hasan M. (Hasan Munir), 1974-
Published: (2009)

A fully microfabricated two-dimensional electrospray array with applications to space propulsion
by: Gassend, Blaise L. P. (Blaise Laurent Patrick), 1978-
Published: (2008)

A study of vacuum packaging methods for a microfabricated suspended tube reactor
by: Chou, Jeremy Chi-Hung, 1977-
Published: (2014)

Comparison of different molds (epoxy, polymer and silicon) for microfabrication by hot embossing technique
by: Gupta, A., et al.
Published: (2013)

Microfabrication of biochip
by: Balakrishnan, Vishnuvarthan
Published: (2011)

An air-breathing, portable thermoelectric power generator based on a microfabricated silicon combustor
by: Marton, Christopher Henry
Published: (2011)

Microfabrication technology for biochips
by: Lim, Wei Wen.
Published: (2013)

Measuring mechanical properties of the tectorial membrane with a microfabricated probe
by: Gu, Jianwen Wendy, 1981-
Published: (2005)

Thermally-actuated piezoresistively-sensed mechanical silicon oscillator
by: Sundaram, Subramanian, Ph. D. Massachusetts Institute of Technology
Published: (2014)

Microfabrication of Optically Flat Silicon Micro-Mirrors for Fully Programmable Micro-Diffraction Gratings
by: Timotijevic, B., et al.
Published: (2014)

Measurement of adhesion and mechanical properties of thin films using microfabricated structures
by: Allen, Mark George
Published: (2005)

Microfabrication methods for the study of chemotaxis
by: Shur, Maiya, 1980-
Published: (2005)

Assessing the viability of various metallic microfabrication techniques
by: Hastings, Abel Z., 1973-
Published: (2005)

Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices
by: Zhao, Xinghai, et al.
Published: (2024)

Electrical and mechanical mechanisms for color variation in the spraying of metallic paints
by: Inkpen, Stuart
Published: (2005)

Microfabricated reactors for partial oxidation reactions
by: Srinivasan, Ravi, 1971-
Published: (2005)

Simulation strategies for microfabricated chemical systems
by: Hsing, I-Ming, 1968-
Published: (2005)

A voltage-tunable microfabricated accelerometer
by: Lubratt, Mark Paul
Published: (2007)

Microfabrication strageties for annulus fibrosus tissue engineering
by: Chuah, Yon Jin
Published: (2015)

Physical mechanisms of cellular injury in electrical trauma
by: Gaylor, Diane Catherine
Published: (2007)

Microfabricated magnetophoretic focusing systems for the separation of submicrometer particles
by: Park, Edward S., 1974-
Published: (2006)

Microfabricated thin-film batteries : technology and potential applications
by: Greiner, Julia
Published: (2007)