Characterization of mechanical properties of microelectronic thin films
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/14081 |
| _version_ | 1826198282710286336 |
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| author | Maseeh, Fariborz |
| author2 | Stephen D. Senturia. |
| author_facet | Stephen D. Senturia. Maseeh, Fariborz |
| author_sort | Maseeh, Fariborz |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990. |
| first_indexed | 2024-09-23T11:02:26Z |
| format | Thesis |
| id | mit-1721.1/14081 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T11:02:26Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/140812022-01-21T19:39:37Z Characterization of mechanical properties of microelectronic thin films Maseeh, Fariborz Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Civil Engineering. Massachusetts Institute of Technology. Department of Civil Engineering Massachusetts Institute of Technology. Department of Civil and Environmental Engineering Civil Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990. Includes bibliographical references (leaves 172-181). by Fariborz Maseeh-Tehrani. Ph.D. 2005-08-10T19:34:11Z 2005-08-10T19:34:11Z 1990 1990 Thesis http://hdl.handle.net/1721.1/14081 23613820 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 196 leaves 9418967 bytes 9418722 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Civil Engineering. Maseeh, Fariborz Characterization of mechanical properties of microelectronic thin films |
| title | Characterization of mechanical properties of microelectronic thin films |
| title_full | Characterization of mechanical properties of microelectronic thin films |
| title_fullStr | Characterization of mechanical properties of microelectronic thin films |
| title_full_unstemmed | Characterization of mechanical properties of microelectronic thin films |
| title_short | Characterization of mechanical properties of microelectronic thin films |
| title_sort | characterization of mechanical properties of microelectronic thin films |
| topic | Civil Engineering. |
| url | http://hdl.handle.net/1721.1/14081 |
| work_keys_str_mv | AT maseehfariborz characterizationofmechanicalpropertiesofmicroelectronicthinfilms |