Characterization of mechanical properties of microelectronic thin films

Characterization of mechanical properties of microelectronic thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil Engineering, 1990.

Bibliographic Details
Main Author: Maseeh, Fariborz
Other Authors: Stephen D. Senturia.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Civil Engineering.
Online Access:http://hdl.handle.net/1721.1/14081

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