Wet-based digital etching on GaN and AlGaN
Department of Defense (DoD)
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
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AIP Publishing
2022
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| Online Access: | https://hdl.handle.net/1721.1/141928 |
| _version_ | 1811084909734789120 |
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| author | Shih, Pao-Chuan Engel, Zachary Ahmad, Habib Doolittle, William Alan Palacios, Tomás |
| author2 | Massachusetts Institute of Technology. Microsystems Technology Laboratories |
| author_facet | Massachusetts Institute of Technology. Microsystems Technology Laboratories Shih, Pao-Chuan Engel, Zachary Ahmad, Habib Doolittle, William Alan Palacios, Tomás |
| author_sort | Shih, Pao-Chuan |
| collection | MIT |
| description | Department of Defense (DoD) |
| first_indexed | 2024-09-23T12:59:32Z |
| format | Article |
| id | mit-1721.1/141928 |
| institution | Massachusetts Institute of Technology |
| last_indexed | 2024-09-23T12:59:32Z |
| publishDate | 2022 |
| publisher | AIP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1419282023-01-27T18:25:09Z Wet-based digital etching on GaN and AlGaN Shih, Pao-Chuan Engel, Zachary Ahmad, Habib Doolittle, William Alan Palacios, Tomás Massachusetts Institute of Technology. Microsystems Technology Laboratories Physics and Astronomy (miscellaneous) Department of Defense (DoD) 2022-04-19T15:43:03Z 2022-04-19T15:43:03Z 2022-01-10 Article http://purl.org/eprint/type/JournalArticle 0003-6951 1077-3118 https://hdl.handle.net/1721.1/141928 Shih, Pao-Chuan, Engel, Zachary, Ahmad, Habib, Doolittle, William Alan and Palacios, Tomás. 2022. "Wet-based digital etching on GaN and AlGaN." Applied Physics Letters, 120 (2). 10.1063/5.0074443 10.1063/5.0074443 Applied Physics Letters Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf AIP Publishing Pao-Chuan Shih |
| spellingShingle | Physics and Astronomy (miscellaneous) Shih, Pao-Chuan Engel, Zachary Ahmad, Habib Doolittle, William Alan Palacios, Tomás Wet-based digital etching on GaN and AlGaN |
| title | Wet-based digital etching on GaN and AlGaN |
| title_full | Wet-based digital etching on GaN and AlGaN |
| title_fullStr | Wet-based digital etching on GaN and AlGaN |
| title_full_unstemmed | Wet-based digital etching on GaN and AlGaN |
| title_short | Wet-based digital etching on GaN and AlGaN |
| title_sort | wet based digital etching on gan and algan |
| topic | Physics and Astronomy (miscellaneous) |
| url | https://hdl.handle.net/1721.1/141928 |
| work_keys_str_mv | AT shihpaochuan wetbaseddigitaletchingonganandalgan AT engelzachary wetbaseddigitaletchingonganandalgan AT ahmadhabib wetbaseddigitaletchingonganandalgan AT doolittlewilliamalan wetbaseddigitaletchingonganandalgan AT palaciostomas wetbaseddigitaletchingonganandalgan |