Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process
Department of Defense (DoD)
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
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Institute of Electrical and Electronics Engineers (IEEE)
2022
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| Online Access: | https://hdl.handle.net/1721.1/141929 |
| _version_ | 1811094994293882880 |
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| author | Shih, Pao-Chuan Rughoobur, Girish Cheng, Kai Akinwande, Akintunde I. Palacios, Tomas |
| author2 | Massachusetts Institute of Technology. Microsystems Technology Laboratories |
| author_facet | Massachusetts Institute of Technology. Microsystems Technology Laboratories Shih, Pao-Chuan Rughoobur, Girish Cheng, Kai Akinwande, Akintunde I. Palacios, Tomas |
| author_sort | Shih, Pao-Chuan |
| collection | MIT |
| description | Department of Defense (DoD) |
| first_indexed | 2024-09-23T16:08:50Z |
| format | Article |
| id | mit-1721.1/141929 |
| institution | Massachusetts Institute of Technology |
| last_indexed | 2024-09-23T16:08:50Z |
| publishDate | 2022 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/1419292023-01-10T15:46:35Z Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process Shih, Pao-Chuan Rughoobur, Girish Cheng, Kai Akinwande, Akintunde I. Palacios, Tomas Massachusetts Institute of Technology. Microsystems Technology Laboratories Electrical and Electronic Engineering Electronic, Optical and Magnetic Materials Department of Defense (DoD) 2022-04-19T15:43:28Z 2022-04-19T15:43:28Z 2021-03 Article http://purl.org/eprint/type/JournalArticle 0741-3106 1558-0563 https://hdl.handle.net/1721.1/141929 Shih, Pao-Chuan, Rughoobur, Girish, Cheng, Kai, Akinwande, Akintunde I. and Palacios, Tomas. 2021. "Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process." IEEE Electron Device Letters, 42 (3). 10.1109/LED.2021.3052715 10.1109/led.2021.3052715 IEEE Electron Device Letters Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) Pao-Chuan Shih |
| spellingShingle | Electrical and Electronic Engineering Electronic, Optical and Magnetic Materials Shih, Pao-Chuan Rughoobur, Girish Cheng, Kai Akinwande, Akintunde I. Palacios, Tomas Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process |
| title | Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process |
| title_full | Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process |
| title_fullStr | Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process |
| title_full_unstemmed | Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process |
| title_short | Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process |
| title_sort | self align gated gan field emitter arrays sharpened by a digital etching process |
| topic | Electrical and Electronic Engineering Electronic, Optical and Magnetic Materials |
| url | https://hdl.handle.net/1721.1/141929 |
| work_keys_str_mv | AT shihpaochuan selfaligngatedganfieldemitterarrayssharpenedbyadigitaletchingprocess AT rughooburgirish selfaligngatedganfieldemitterarrayssharpenedbyadigitaletchingprocess AT chengkai selfaligngatedganfieldemitterarrayssharpenedbyadigitaletchingprocess AT akinwandeakintundei selfaligngatedganfieldemitterarrayssharpenedbyadigitaletchingprocess AT palaciostomas selfaligngatedganfieldemitterarrayssharpenedbyadigitaletchingprocess |