Measurement of adhesion and mechanical properties of thin films using microfabricated structures
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989.
| Main Author: | |
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/14329 |
| _version_ | 1826216506338312192 |
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| author | Allen, Mark George |
| author2 | Stephen D. Senturia. |
| author_facet | Stephen D. Senturia. Allen, Mark George |
| author_sort | Allen, Mark George |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989. |
| first_indexed | 2024-09-23T16:48:27Z |
| format | Thesis |
| id | mit-1721.1/14329 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T16:48:27Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/143292019-04-12T13:48:31Z Measurement of adhesion and mechanical properties of thin films using microfabricated structures Allen, Mark George Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Chemical Engineering. Massachusetts Institute of Technology. Dept. of Chemical Engineering. Chemical Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1989. Includes bibliographical references (leaves 188-193). by Mark George Allen. Ph.D. 2005-08-10T15:49:26Z 2005-08-10T15:49:26Z 1989 1989 Thesis http://hdl.handle.net/1721.1/14329 21885566 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 193 leaves 13883150 bytes 13882908 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Chemical Engineering. Allen, Mark George Measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| title | Measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| title_full | Measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| title_fullStr | Measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| title_full_unstemmed | Measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| title_short | Measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| title_sort | measurement of adhesion and mechanical properties of thin films using microfabricated structures |
| topic | Chemical Engineering. |
| url | http://hdl.handle.net/1721.1/14329 |
| work_keys_str_mv | AT allenmarkgeorge measurementofadhesionandmechanicalpropertiesofthinfilmsusingmicrofabricatedstructures |