High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers
© 1966-2012 IEEE. Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This article presents a CMOS quantum vector-field magnetometer that miniaturize...
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| Format: | Article |
| Language: | English |
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Institute of Electrical and Electronics Engineers (IEEE)
2022
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| Online Access: | https://hdl.handle.net/1721.1/143593 |
| _version_ | 1811081959565164544 |
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| author | Ibrahim, Mohamed I Foy, Christopher Englund, Dirk R Han, Ruonan |
| author2 | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Ibrahim, Mohamed I Foy, Christopher Englund, Dirk R Han, Ruonan |
| author_sort | Ibrahim, Mohamed I |
| collection | MIT |
| description | © 1966-2012 IEEE. Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This article presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated 2.87 GHz magnetic field with < 5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm2 in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300 × 80 μm2 diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This ON-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves a measured 25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz1/2, marking a 130 × improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area. |
| first_indexed | 2024-09-23T11:55:08Z |
| format | Article |
| id | mit-1721.1/143593 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T11:55:08Z |
| publishDate | 2022 |
| publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| record_format | dspace |
| spelling | mit-1721.1/1435932023-06-26T19:52:16Z High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers Ibrahim, Mohamed I Foy, Christopher Englund, Dirk R Han, Ruonan Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science © 1966-2012 IEEE. Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This article presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated 2.87 GHz magnetic field with < 5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm2 in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300 × 80 μm2 diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This ON-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves a measured 25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz1/2, marking a 130 × improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area. 2022-06-29T16:43:49Z 2022-06-29T16:43:49Z 2021 2022-06-29T16:36:45Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/143593 Ibrahim, Mohamed I, Foy, Christopher, Englund, Dirk R and Han, Ruonan. 2021. "High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers." IEEE Journal of Solid-State Circuits, 56 (3). en 10.1109/JSSC.2020.3027056 IEEE Journal of Solid-State Circuits Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf Institute of Electrical and Electronics Engineers (IEEE) arXiv |
| spellingShingle | Ibrahim, Mohamed I Foy, Christopher Englund, Dirk R Han, Ruonan High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
| title | High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
| title_full | High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
| title_fullStr | High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
| title_full_unstemmed | High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
| title_short | High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
| title_sort | high scalability cmos quantum magnetometer with spin state excitation and detection of diamond color centers |
| url | https://hdl.handle.net/1721.1/143593 |
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