Integrated visible-light liquid-crystal-based phase modulators

In this work, an integrated liquid-crystal-based phase modulator operating at visible wavelengths was developed and experimentally demonstrated. A visible-light silicon-nitride-based 300-mm-wafer foundry platform and a liquid-crystal integration process were developed to leverage the birefringence o...

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Bibliographic Details
Main Authors: Notaros, Milica, Dyer, Thomas, Raval, Manan, Baiocco, Christopher, Notaros, Jelena, Watts, Michael R
Other Authors: Massachusetts Institute of Technology. Research Laboratory of Electronics
Format: Article
Language:English
Published: Optica Publishing Group 2022
Online Access:https://hdl.handle.net/1721.1/143776
Description
Summary:In this work, an integrated liquid-crystal-based phase modulator operating at visible wavelengths was developed and experimentally demonstrated. A visible-light silicon-nitride-based 300-mm-wafer foundry platform and a liquid-crystal integration process were developed to leverage the birefringence of liquid crystal to actively tune the effective index of a section of silicon-nitride waveguide and induce a phase shift over its length. The device was experimentally shown to achieve a 41π phase shift within 4.8 Vpp for a 500-µm-long modulator, which means that a 2π phase shifter would need to be only 24.4 µm long. This device is a compact and low-power solution to the challenge of integrated phase modulation in silicon nitride and paves the way for future low-power small-form-factor integrated systems at visible wavelengths.