Piezo-optomechanical cantilever modulators for VLSI visible photonics
<jats:p> Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible phot...
| Main Authors: | , , , , , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing
2022
|
| Online Access: | https://hdl.handle.net/1721.1/144032 |
| _version_ | 1826195408826662912 |
|---|---|
| author | Dong, Mark Heim, David Witte, Alex Clark, Genevieve Leenheer, Andrew J Dominguez, Daniel Zimmermann, Matthew Wen, Y Henry Gilbert, Gerald Englund, Dirk Eichenfield, Matt |
| author2 | Massachusetts Institute of Technology. Research Laboratory of Electronics |
| author_facet | Massachusetts Institute of Technology. Research Laboratory of Electronics Dong, Mark Heim, David Witte, Alex Clark, Genevieve Leenheer, Andrew J Dominguez, Daniel Zimmermann, Matthew Wen, Y Henry Gilbert, Gerald Englund, Dirk Eichenfield, Matt |
| author_sort | Dong, Mark |
| collection | MIT |
| description | <jats:p> Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 V<jats:sub>π</jats:sub> cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 V<jats:sub>π</jats:sub> cm. </jats:p> |
| first_indexed | 2024-09-23T10:12:12Z |
| format | Article |
| id | mit-1721.1/144032 |
| institution | Massachusetts Institute of Technology |
| language | English |
| last_indexed | 2024-09-23T10:12:12Z |
| publishDate | 2022 |
| publisher | AIP Publishing |
| record_format | dspace |
| spelling | mit-1721.1/1440322023-02-01T21:39:18Z Piezo-optomechanical cantilever modulators for VLSI visible photonics Dong, Mark Heim, David Witte, Alex Clark, Genevieve Leenheer, Andrew J Dominguez, Daniel Zimmermann, Matthew Wen, Y Henry Gilbert, Gerald Englund, Dirk Eichenfield, Matt Massachusetts Institute of Technology. Research Laboratory of Electronics <jats:p> Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 V<jats:sub>π</jats:sub> cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 V<jats:sub>π</jats:sub> cm. </jats:p> 2022-07-25T17:23:58Z 2022-07-25T17:23:58Z 2022-05-01 2022-07-25T17:20:29Z Article http://purl.org/eprint/type/JournalArticle https://hdl.handle.net/1721.1/144032 Dong, Mark, Heim, David, Witte, Alex, Clark, Genevieve, Leenheer, Andrew J et al. 2022. "Piezo-optomechanical cantilever modulators for VLSI visible photonics." APL Photonics, 7 (5). en 10.1063/5.0088424 APL Photonics Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/4.0/ application/pdf AIP Publishing arXiv |
| spellingShingle | Dong, Mark Heim, David Witte, Alex Clark, Genevieve Leenheer, Andrew J Dominguez, Daniel Zimmermann, Matthew Wen, Y Henry Gilbert, Gerald Englund, Dirk Eichenfield, Matt Piezo-optomechanical cantilever modulators for VLSI visible photonics |
| title | Piezo-optomechanical cantilever modulators for VLSI visible photonics |
| title_full | Piezo-optomechanical cantilever modulators for VLSI visible photonics |
| title_fullStr | Piezo-optomechanical cantilever modulators for VLSI visible photonics |
| title_full_unstemmed | Piezo-optomechanical cantilever modulators for VLSI visible photonics |
| title_short | Piezo-optomechanical cantilever modulators for VLSI visible photonics |
| title_sort | piezo optomechanical cantilever modulators for vlsi visible photonics |
| url | https://hdl.handle.net/1721.1/144032 |
| work_keys_str_mv | AT dongmark piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT heimdavid piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT wittealex piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT clarkgenevieve piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT leenheerandrewj piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT dominguezdaniel piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT zimmermannmatthew piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT wenyhenry piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT gilbertgerald piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT englunddirk piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics AT eichenfieldmatt piezooptomechanicalcantilevermodulatorsforvlsivisiblephotonics |