Piezo-optomechanical cantilever modulators for VLSI visible photonics
<jats:p> Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible phot...
Main Authors: | Dong, Mark, Heim, David, Witte, Alex, Clark, Genevieve, Leenheer, Andrew J, Dominguez, Daniel, Zimmermann, Matthew, Wen, Y Henry, Gilbert, Gerald, Englund, Dirk, Eichenfield, Matt |
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Other Authors: | Massachusetts Institute of Technology. Research Laboratory of Electronics |
Format: | Article |
Language: | English |
Published: |
AIP Publishing
2022
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Online Access: | https://hdl.handle.net/1721.1/144032 |
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