Sol-gel derived tantalum oxide thin films
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/14835 |
| _version_ | 1826205417426911232 |
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| author | Silverman, Lee Arnold, 1959- |
| author2 | Donald R. Uhlmann. |
| author_facet | Donald R. Uhlmann. Silverman, Lee Arnold, 1959- |
| author_sort | Silverman, Lee Arnold, 1959- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987. |
| first_indexed | 2024-09-23T13:12:22Z |
| format | Thesis |
| id | mit-1721.1/14835 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:12:22Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/148352019-05-10T03:07:50Z Sol-gel derived tantalum oxide thin films Silverman, Lee Arnold, 1959- Donald R. Uhlmann. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Materials Science and Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987. Vita. Bibliography: leaves 183-185. by Lee Arnold Silverman. Ph.D. 2005-08-08T20:13:27Z 2005-08-08T20:13:27Z 1987 Thesis http://hdl.handle.net/1721.1/14835 17633394 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 186 leaves 10901181 bytes 10900933 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering. Silverman, Lee Arnold, 1959- Sol-gel derived tantalum oxide thin films |
| title | Sol-gel derived tantalum oxide thin films |
| title_full | Sol-gel derived tantalum oxide thin films |
| title_fullStr | Sol-gel derived tantalum oxide thin films |
| title_full_unstemmed | Sol-gel derived tantalum oxide thin films |
| title_short | Sol-gel derived tantalum oxide thin films |
| title_sort | sol gel derived tantalum oxide thin films |
| topic | Materials Science and Engineering. |
| url | http://hdl.handle.net/1721.1/14835 |
| work_keys_str_mv | AT silvermanleearnold1959 solgelderivedtantalumoxidethinfilms |