Sol-gel derived tantalum oxide thin films

Sol-gel derived tantalum oxide thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1987.

Bibliographic Details
Main Author:	Silverman, Lee Arnold, 1959-
Other Authors:	Donald R. Uhlmann.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Materials Science and Engineering.
Online Access:	http://hdl.handle.net/1721.1/14835

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