Modeling microdefects formation in crystalline silicon : the roles of point defects and oxygen
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, February 2003.
Main Author: | Wang, Zhihong, 1972- |
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Other Authors: | Robert A. Brown. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2005
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/16905 |
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