Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/17389 |
| _version_ | 1826204859926315008 |
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| author | Huguenin, S. Carolene |
| author2 | C.V. Thompson, II. |
| author_facet | C.V. Thompson, II. Huguenin, S. Carolene |
| author_sort | Huguenin, S. Carolene |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. |
| first_indexed | 2024-09-23T13:02:30Z |
| format | Thesis |
| id | mit-1721.1/17389 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T13:02:30Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/173892019-04-12T09:02:15Z Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties Huguenin, S. Carolene C.V. Thompson, II. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. Includes bibliographical references (leaves 58-59). by S. Carolene Huguenin. M.S. 2005-06-02T14:42:56Z 2005-06-02T14:42:56Z 1994 1994 Thesis http://hdl.handle.net/1721.1/17389 32031484 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 59 leaves 4188909 bytes 4193428 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Huguenin, S. Carolene Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| title | Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| title_full | Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| title_fullStr | Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| title_full_unstemmed | Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| title_short | Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| title_sort | electrostatic deflection of free standing tungsten microbridges as a novel means for characterization of thin film mechanical properties |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/17389 |
| work_keys_str_mv | AT hugueninscarolene electrostaticdeflectionoffreestandingtungstenmicrobridgesasanovelmeansforcharacterizationofthinfilmmechanicalproperties |