Electrostatic deflection of free-standing tungsten microbridges as a novel means for characterization of thin film mechanical properties
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/17389 |