Design of a silicon carbide micro-hotplate geometry for high temperature chemical sensing
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2001.
Autor principal: | Benn, Gregory (Gregory Scott), 1977- |
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Outros Autores: | John Brisson. |
Formato: | Tese |
Idioma: | eng |
Publicado em: |
Massachusetts Institute of Technology
2005
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Assuntos: | |
Acesso em linha: | http://hdl.handle.net/1721.1/17535 |
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