Design of a silicon carbide micro-hotplate geometry for high temperature chemical sensing

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2001.

Detalhes bibliográficos
Autor principal: Benn, Gregory (Gregory Scott), 1977-
Outros Autores: John Brisson.
Formato: Tese
Idioma:eng
Publicado em: Massachusetts Institute of Technology 2005
Assuntos:
Acesso em linha:http://hdl.handle.net/1721.1/17535

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