High performance amplifier topologies implemented with a micro-machined vibrating capacitor

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliographic Details
Main Author: Aina, Akin Adeniyi, 1974-
Other Authors: Timothy Denison and Steven Leeb.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Online Access:http://hdl.handle.net/1721.1/17595
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author Aina, Akin Adeniyi, 1974-
author2 Timothy Denison and Steven Leeb.
author_facet Timothy Denison and Steven Leeb.
Aina, Akin Adeniyi, 1974-
author_sort Aina, Akin Adeniyi, 1974-
collection MIT
description Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.
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spelling mit-1721.1/175952019-04-12T15:48:09Z High performance amplifier topologies implemented with a micro-machined vibrating capacitor Aina, Akin Adeniyi, 1974- Timothy Denison and Steven Leeb. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003. Includes bibliographical references (leaves 201-206). In this work, the design of a MEMS based differential amplifier is investigated. The goal of this investigation is to design, fabricate and characterize a differential amplifier whose performance is based on a physically coupled, but electrically isolated fully differential mechanical transconductor input stage that is fabricated using SOI-MEMS technology. The MEMS sensor will act as a vibrating capacitor input stage. It will provide galvanic isolation and up-modulation of the input signal as it vibrates. The galvanic isolation facilitates low-leakage inputs and a very wide input common mode voltage range. The up-modulation provides a means for achieving a low input referred offset voltage and low-noise via the use of correlated double sampling or chopper stabilization. At the system level, this amplifier consists of two major loops: the drive loop and a sense loop. The drive loop includes half of the MEMS structure along with some electronics and provides a means of moving the beam at a constant frequency. The drive loop's design was facilitated by describing function analysis. The drive loop vibrated the beam at its mechanical resonance because at that frequency, the displacement of the beam is maximized for a given electrostatic force and consequently, the sensitivity of the amplifier is maximized. The sense loop includes the other half of the beam and some electronics whose role is to process the differential input signal applied at the MEMS structure's inputs. Common-mode rejection is performed by the mechanical transconductor, while the sense loop's crossover frequency sets the signal bandwidth. (cont.) The performance of the amplifier agreed very well with hand calculations and simulations. The noise performance was dominated by the total noise at the preamplifier's input. The noise performance achieved in this design was 55 ... Hz , which is higher than that of other high performance amplifiers. Based on the analytical model created for the amplifier, a noise level of 450 ... Hz can be achieved when the circuitry is fully integrated with the sensor. by Akin Adeniyi Aina. Ph.D. 2005-06-02T16:19:24Z 2005-06-02T16:19:24Z 2003 2003 Thesis http://hdl.handle.net/1721.1/17595 53278649 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 206 leaves 11979149 bytes 12005741 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
spellingShingle Electrical Engineering and Computer Science.
Aina, Akin Adeniyi, 1974-
High performance amplifier topologies implemented with a micro-machined vibrating capacitor
title High performance amplifier topologies implemented with a micro-machined vibrating capacitor
title_full High performance amplifier topologies implemented with a micro-machined vibrating capacitor
title_fullStr High performance amplifier topologies implemented with a micro-machined vibrating capacitor
title_full_unstemmed High performance amplifier topologies implemented with a micro-machined vibrating capacitor
title_short High performance amplifier topologies implemented with a micro-machined vibrating capacitor
title_sort high performance amplifier topologies implemented with a micro machined vibrating capacitor
topic Electrical Engineering and Computer Science.
url http://hdl.handle.net/1721.1/17595
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