Characterization and modeling of polysilicon MEMS chemical-mechanical polishing

Characterization and modeling of polysilicon MEMS chemical-mechanical polishing

Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author: Tang, Brian D. (Brian David), 1980-
Other Authors: Duane S. Boning.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/17983

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