Analysis of DRIE uniformity for microelectromechanical systems

Analysis of DRIE uniformity for microelectromechanical systems

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author:	Hill, Tyrone F. (Tyrone Frank), 1980-
Other Authors:	Duane S. Boning.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/18060

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