$Maskless nanolithography and imaging with diffractive optical arrays$

Maskless nanolithography and imaging with diffractive optical arrays

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliográfalaš dieđut
Váldodahkki:	Gil, Darío, 1975-
Eará dahkkit:	Henry I. Smith.
Materiálatiipa:	Oahppočájánas
Giella:	eng
Almmustuhtton:	Massachusetts Institute of Technology 2005
Fáttát:	Electrical Engineering and Computer Science.
Liŋkkat:	http://hdl.handle.net/1721.1/18066

Govvádus
Čoahkkáigeassu:	Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Geahča maid