Multiscale models of the metalorganic vapor phase epitaxy process

Multiscale models of the metalorganic vapor phase epitaxy process

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2000.

Bibliographic Details
Main Author: Venkataramani, Rajesh, 1972-
Other Authors: Klavs F. Jensen.
Format: Thesis
Language:en_US
Published: Massachusetts Institute of Technology 2005
Subjects:
Chemical Engineering.
Online Access:http://hdl.handle.net/1721.1/26883

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