A low-leakage 3-way silicon microvalve

A low-leakage 3-way silicon microvalve

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2004.

Bibliographic Details
Main Author: Sihler, Joachim, 1971-
Other Authors: Alexander H. Slocum.
Format: Thesis
Language:en_US
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/27105

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