Particle characterization for an eight inch wafer tungsten chemical vapor deposition system
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.
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| Format: | Thesis |
| Language: | en_US |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/28051 |
| _version_ | 1811070773403582464 |
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| author | Morrison, Troy |
| author2 | Lionel C. Kimerling. |
| author_facet | Lionel C. Kimerling. Morrison, Troy |
| author_sort | Morrison, Troy |
| collection | MIT |
| description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. |
| first_indexed | 2024-09-23T08:41:20Z |
| format | Thesis |
| id | mit-1721.1/28051 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T08:41:20Z |
| publishDate | 2005 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/280512019-04-09T19:15:56Z Particle characterization for an eight inch wafer tungsten chemical vapor deposition system Morrison, Troy Lionel C. Kimerling. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. Includes bibliographical references (p. 95-97). by Troy Morrison. M.S. 2005-09-26T18:13:21Z 2005-09-26T18:13:21Z 1994 1994 Thesis http://hdl.handle.net/1721.1/28051 30950827 en_US M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 97 p. 3352771 bytes 3364072 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Morrison, Troy Particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| title | Particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| title_full | Particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| title_fullStr | Particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| title_full_unstemmed | Particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| title_short | Particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| title_sort | particle characterization for an eight inch wafer tungsten chemical vapor deposition system |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/28051 |
| work_keys_str_mv | AT morrisontroy particlecharacterizationforaneightinchwafertungstenchemicalvapordepositionsystem |