On the design of lithographic interferometers and their application

On the design of lithographic interferometers and their application

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author:	Walsh, Michael E. (Michael Edward), 1975-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	en_US
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/28741

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