Semiconductor process design : representations, tools, and methodologies
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991.
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2006
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/29858 |
| _version_ | 1826189365733228544 |
|---|---|
| author | Boning, Duane S |
| author2 | Dimitri A. Antoniadis. |
| author_facet | Dimitri A. Antoniadis. Boning, Duane S |
| author_sort | Boning, Duane S |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991. |
| first_indexed | 2024-09-23T08:13:36Z |
| format | Thesis |
| id | mit-1721.1/29858 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T08:13:36Z |
| publishDate | 2006 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/298582022-01-13T07:54:29Z Semiconductor process design : representations, tools, and methodologies Boning, Duane S Dimitri A. Antoniadis. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1991. Vita. Includes bibliographical references (p. 267-278). by Duane S. Boning. Ph.D. 2006-03-24T17:57:39Z 2006-03-24T17:57:39Z 1991 1991 Thesis http://hdl.handle.net/1721.1/29858 24343464 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 301 p. 14257620 bytes 14298504 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Boning, Duane S Semiconductor process design : representations, tools, and methodologies |
| title | Semiconductor process design : representations, tools, and methodologies |
| title_full | Semiconductor process design : representations, tools, and methodologies |
| title_fullStr | Semiconductor process design : representations, tools, and methodologies |
| title_full_unstemmed | Semiconductor process design : representations, tools, and methodologies |
| title_short | Semiconductor process design : representations, tools, and methodologies |
| title_sort | semiconductor process design representations tools and methodologies |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/29858 |
| work_keys_str_mv | AT boningduanes semiconductorprocessdesignrepresentationstoolsandmethodologies |