Nanometer-precision electron-beam lithography with applications in integrated optics

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003.

Bibliographic Details
Main Author:	Hastings, Jeffrey Todd, 1975-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/29949

Internet

http://hdl.handle.net/1721.1/29949