Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993.
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| Other Authors: | |
| Format: | Thesis |
| Language: | eng |
| Published: |
Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/31038 |
| _version_ | 1826195968124518400 |
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| author | Liu, Joanne |
| author2 | Herbert H. Sawin. |
| author_facet | Herbert H. Sawin. Liu, Joanne |
| author_sort | Liu, Joanne |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993. |
| first_indexed | 2024-09-23T10:18:42Z |
| format | Thesis |
| id | mit-1721.1/31038 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T10:18:42Z |
| publishDate | 2006 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/310382019-04-12T13:48:47Z Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas Liu, Joanne Herbert H. Sawin. Massachusetts Institute of Technology. Dept. of Chemical Engineering Chemical Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993. Includes bibliographical references (p. 207-213). by Joanne Liu. Ph.D. 2006-02-02T18:41:44Z 2006-02-02T18:41:44Z 1993 1993 Thesis http://hdl.handle.net/1721.1/31038 28153004 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 495 p. 19590818 bytes 19660224 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Chemical Engineering Liu, Joanne Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas |
| title | Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas |
| title_full | Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas |
| title_fullStr | Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas |
| title_full_unstemmed | Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas |
| title_short | Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas |
| title_sort | scaling relationships for power deposition and ion bombardment in radio frequency plasmas |
| topic | Chemical Engineering |
| url | http://hdl.handle.net/1721.1/31038 |
| work_keys_str_mv | AT liujoanne scalingrelationshipsforpowerdepositionandionbombardmentinradiofrequencyplasmas |