Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas

Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993.

Bibliographic Details
Main Author: Liu, Joanne
Other Authors: Herbert H. Sawin.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2006
Subjects:
Chemical Engineering
Online Access:http://hdl.handle.net/1721.1/31038

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