Vapor phase hydrolysis of silicon tetrafluoride
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1947.
Main Author: | Secord, Robert N. (Robert Newton) |
---|---|
Other Authors: | D.B. Broughton. |
Format: | Thesis |
Language: | eng |
Published: |
Massachusetts Institute of Technology
2006
|
Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/31040 |
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