Vapor phase hydrolysis of silicon tetrafluoride

Vapor phase hydrolysis of silicon tetrafluoride

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1947.

Bibliographic Details
Main Author:	Secord, Robert N. (Robert Newton)
Other Authors:	D.B. Broughton.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Chemical Engineering
Online Access:	http://hdl.handle.net/1721.1/31040

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