Microstructural evolution of epitaxial dielectric films derived from chemical precursors
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/32167 |
| _version_ | 1826191135612076032 |
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| author | Ng, Man Fai |
| author2 | Michael J. Cima. |
| author_facet | Michael J. Cima. Ng, Man Fai |
| author_sort | Ng, Man Fai |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. |
| first_indexed | 2024-09-23T08:50:45Z |
| format | Thesis |
| id | mit-1721.1/32167 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T08:50:45Z |
| publishDate | 2006 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/321672019-04-10T19:22:46Z Microstructural evolution of epitaxial dielectric films derived from chemical precursors Ng, Man Fai Michael J. Cima. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (leaves 138-150). by Man Fai Ngg. Ph.D. 2006-03-29T18:20:59Z 2006-03-29T18:20:59Z 1995 1995 Thesis http://hdl.handle.net/1721.1/32167 33669110 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 150 leaves 8698263 bytes 8706548 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering Ng, Man Fai Microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| title | Microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| title_full | Microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| title_fullStr | Microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| title_full_unstemmed | Microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| title_short | Microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| title_sort | microstructural evolution of epitaxial dielectric films derived from chemical precursors |
| topic | Materials Science and Engineering |
| url | http://hdl.handle.net/1721.1/32167 |
| work_keys_str_mv | AT ngmanfai microstructuralevolutionofepitaxialdielectricfilmsderivedfromchemicalprecursors |