Microstructural evolution of epitaxial dielectric films derived from chemical precursors

Microstructural evolution of epitaxial dielectric films derived from chemical precursors

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Bibliographic Details
Main Author:	Ng, Man Fai
Other Authors:	Michael J. Cima.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/32167

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