Benchmarking semiconductor lithography equipment development & sourcing practices among leading-edge U.S. manufacturers

Benchmarking semiconductor lithography equipment development & sourcing practices among leading-edge U.S. manufacturers

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.

Bibliographic Details
Main Author:	Pieczulewski, Charles N. (Charles Nicholas)
Other Authors:	Charles H. Fine.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/32171

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