Initiated chemical vapor deposition of functional polyacrylic thin films
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005.
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| Muut tekijät: | |
| Aineistotyyppi: | Opinnäyte |
| Kieli: | eng |
| Julkaistu: |
Massachusetts Institute of Technology
2006
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| Aiheet: | |
| Linkit: | http://hdl.handle.net/1721.1/33608 |
| _version_ | 1826194492865118208 |
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| author | Mao, Yu, 1975- |
| author2 | Karen K. Gleason and Adam C. Powell, IV. |
| author_facet | Karen K. Gleason and Adam C. Powell, IV. Mao, Yu, 1975- |
| author_sort | Mao, Yu, 1975- |
| collection | MIT |
| description | Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. |
| first_indexed | 2024-09-23T09:56:39Z |
| format | Thesis |
| id | mit-1721.1/33608 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T09:56:39Z |
| publishDate | 2006 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/336082019-04-12T09:08:20Z Initiated chemical vapor deposition of functional polyacrylic thin films iCVD of functional polyacrylic thin films Mao, Yu, 1975- Karen K. Gleason and Adam C. Powell, IV. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Materials Science and Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. Includes bibliographical references. Initiated chemical vapor deposition (iCVD) was explored as a novel method for synthesis of functional polyacrylic thin films. The process introduces a peroxide initiator, which can be decomposed at low temperatures (<200⁰C) and initialize addition reaction of monomer species. The use of low temperatures limits the decomposition chemistry to the bond scission of initiator, while retaining functional groups of monomers, which has been confirmed in the infrared spectroscopy, nuclear magnetic resonance, and x-ray photoelectron spectroscopy of iCVD poly(glycidyl methacrylate) (PGMA) thin films. Studies of PGMA iCVD deposition kinetics and molecular weights indicate a free radical polymerization mechanism and provide guide for vapor-phase synthesis of other vinyl monomers. The retained epoxy groups can crosslink under e-beam irradiation, resulting in e-beam patterning of iCVD PGMA thin films with 80 nm negative-tone features achieved. iCVD copolymerization was also investigated to further tune film composition and properties. A surface propagation mechanism was proposed based on the study of the monomer reactivity ratios and the copolymer molecular weights during iCVD copolymerization. (cont.) The synthesized acrylic copolymers have been investigated in applications as positive-tone e- beam resists, CO₂-developable resists, and low surface energy coatings with improved mechanical properties. The process of iCVD polymerization is extendable to vapor-phase polymerization of other vinyl monomers and creates new opportunities for the application of functional polymer thin films. by Yu Mao. Ph.D. 2006-07-31T15:16:42Z 2006-07-31T15:16:42Z 2005 2005 Thesis http://hdl.handle.net/1721.1/33608 64386933 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 113 leaves 5225859 bytes 5230548 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology |
| spellingShingle | Materials Science and Engineering. Mao, Yu, 1975- Initiated chemical vapor deposition of functional polyacrylic thin films |
| title | Initiated chemical vapor deposition of functional polyacrylic thin films |
| title_full | Initiated chemical vapor deposition of functional polyacrylic thin films |
| title_fullStr | Initiated chemical vapor deposition of functional polyacrylic thin films |
| title_full_unstemmed | Initiated chemical vapor deposition of functional polyacrylic thin films |
| title_short | Initiated chemical vapor deposition of functional polyacrylic thin films |
| title_sort | initiated chemical vapor deposition of functional polyacrylic thin films |
| topic | Materials Science and Engineering. |
| url | http://hdl.handle.net/1721.1/33608 |
| work_keys_str_mv | AT maoyu1975 initiatedchemicalvapordepositionoffunctionalpolyacrylicthinfilms AT maoyu1975 icvdoffunctionalpolyacrylicthinfilms |