Initiated chemical vapor deposition of functional polyacrylic thin films

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005.

Bibliographic Details
Main Author: Mao, Yu, 1975-
Other Authors: Karen K. Gleason and Adam C. Powell, IV.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2006
Subjects:
Online Access:http://hdl.handle.net/1721.1/33608
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author Mao, Yu, 1975-
author2 Karen K. Gleason and Adam C. Powell, IV.
author_facet Karen K. Gleason and Adam C. Powell, IV.
Mao, Yu, 1975-
author_sort Mao, Yu, 1975-
collection MIT
description Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005.
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spelling mit-1721.1/336082019-04-12T09:08:20Z Initiated chemical vapor deposition of functional polyacrylic thin films iCVD of functional polyacrylic thin films Mao, Yu, 1975- Karen K. Gleason and Adam C. Powell, IV. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Materials Science and Engineering. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. Includes bibliographical references. Initiated chemical vapor deposition (iCVD) was explored as a novel method for synthesis of functional polyacrylic thin films. The process introduces a peroxide initiator, which can be decomposed at low temperatures (<200⁰C) and initialize addition reaction of monomer species. The use of low temperatures limits the decomposition chemistry to the bond scission of initiator, while retaining functional groups of monomers, which has been confirmed in the infrared spectroscopy, nuclear magnetic resonance, and x-ray photoelectron spectroscopy of iCVD poly(glycidyl methacrylate) (PGMA) thin films. Studies of PGMA iCVD deposition kinetics and molecular weights indicate a free radical polymerization mechanism and provide guide for vapor-phase synthesis of other vinyl monomers. The retained epoxy groups can crosslink under e-beam irradiation, resulting in e-beam patterning of iCVD PGMA thin films with 80 nm negative-tone features achieved. iCVD copolymerization was also investigated to further tune film composition and properties. A surface propagation mechanism was proposed based on the study of the monomer reactivity ratios and the copolymer molecular weights during iCVD copolymerization. (cont.) The synthesized acrylic copolymers have been investigated in applications as positive-tone e- beam resists, CO₂-developable resists, and low surface energy coatings with improved mechanical properties. The process of iCVD polymerization is extendable to vapor-phase polymerization of other vinyl monomers and creates new opportunities for the application of functional polymer thin films. by Yu Mao. Ph.D. 2006-07-31T15:16:42Z 2006-07-31T15:16:42Z 2005 2005 Thesis http://hdl.handle.net/1721.1/33608 64386933 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 113 leaves 5225859 bytes 5230548 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
spellingShingle Materials Science and Engineering.
Mao, Yu, 1975-
Initiated chemical vapor deposition of functional polyacrylic thin films
title Initiated chemical vapor deposition of functional polyacrylic thin films
title_full Initiated chemical vapor deposition of functional polyacrylic thin films
title_fullStr Initiated chemical vapor deposition of functional polyacrylic thin films
title_full_unstemmed Initiated chemical vapor deposition of functional polyacrylic thin films
title_short Initiated chemical vapor deposition of functional polyacrylic thin films
title_sort initiated chemical vapor deposition of functional polyacrylic thin films
topic Materials Science and Engineering.
url http://hdl.handle.net/1721.1/33608
work_keys_str_mv AT maoyu1975 initiatedchemicalvapordepositionoffunctionalpolyacrylicthinfilms
AT maoyu1975 icvdoffunctionalpolyacrylicthinfilms