Accurate Nanofabrication Techniques for High-Index-Contrast Microphotonic Devices
Thesis Supervisor: Henry I. Smith Title: Joseph F. and Nancy P. Keithley Professor of Electrical Engineering Thesis Supervisor: Harry L. Tuller Title: Professor of Ceramics and Electronic Materials
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| Format: | Technical Report |
| Language: | English |
| Published: |
2006
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| Online Access: | http://hdl.handle.net/1721.1/33798 |