Sub-20nm substrate patterning using a self-assembled nanocrystal template

Sub-20nm substrate patterning using a self-assembled nanocrystal template

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005.

Bibliographic Details
Main Author: Tabone, Ryan C
Other Authors: Vladimir Bulović.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2006
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/34123

Internet

http://hdl.handle.net/1721.1/34123

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