Sub-20nm substrate patterning using a self-assembled nanocrystal template

Sub-20nm substrate patterning using a self-assembled nanocrystal template

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005.

Bibliographic Details
Main Author:	Tabone, Ryan C
Other Authors:	Vladimir BuloviÄ.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/34123

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