Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning

Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author:	Moon, Euclid E. (Euclid Eberle), 1965-
Other Authors:	Henry I. Smith.
Format:	Thesis
Language:	eng
Published:	Massachusetts Institute of Technology 2006
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/34563

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