Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning

Interferometric-spatial-phase imaging for sub-nanometer three-dimensional positioning

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004.

Bibliographic Details
Main Author: Moon, Euclid E. (Euclid Eberle), 1965-
Other Authors: Henry I. Smith.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2006
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/34563

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