Integrated optical switching using titanium nitride micro electromechanical systems

Integrated optical switching using titanium nitride micro electromechanical systems

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.

Bibliographic Details
Main Author: Takahashi, Satoshi, Ph. D. Massachusetts Institute of Technology
Other Authors: George Barbastathis.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Mechanical Engineering.
Online Access:http://hdl.handle.net/1721.1/35645

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