Epitaxial silicon growth rate control
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
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| Format: | Thesis |
| Language: | eng |
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Massachusetts Institute of Technology
2007
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| Online Access: | http://hdl.handle.net/1721.1/36449 |
| _version_ | 1826202055219347456 |
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| author | Yeboah-Amankwah, Safroadu Kwadwo |
| author2 | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science |
| author_facet | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Yeboah-Amankwah, Safroadu Kwadwo |
| author_sort | Yeboah-Amankwah, Safroadu Kwadwo |
| collection | MIT |
| description | Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. |
| first_indexed | 2024-09-23T12:01:28Z |
| format | Thesis |
| id | mit-1721.1/36449 |
| institution | Massachusetts Institute of Technology |
| language | eng |
| last_indexed | 2024-09-23T12:01:28Z |
| publishDate | 2007 |
| publisher | Massachusetts Institute of Technology |
| record_format | dspace |
| spelling | mit-1721.1/364492019-04-10T18:17:25Z Epitaxial silicon growth rate control Yeboah-Amankwah, Safroadu Kwadwo Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Title as it appears in the June 1994 MIT Graduate List: Real time growth rate control of epitaxial silicon. Includes bibliographical references (leaves 65-66). by Safroadu Kwadwo Yeboah-Amankwah. M.Eng. 2007-03-12T17:19:52Z 2007-03-12T17:19:52Z 1994 1994 Thesis http://hdl.handle.net/1721.1/36449 31163544 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 66 leaves application/pdf Massachusetts Institute of Technology |
| spellingShingle | Electrical Engineering and Computer Science Yeboah-Amankwah, Safroadu Kwadwo Epitaxial silicon growth rate control |
| title | Epitaxial silicon growth rate control |
| title_full | Epitaxial silicon growth rate control |
| title_fullStr | Epitaxial silicon growth rate control |
| title_full_unstemmed | Epitaxial silicon growth rate control |
| title_short | Epitaxial silicon growth rate control |
| title_sort | epitaxial silicon growth rate control |
| topic | Electrical Engineering and Computer Science |
| url | http://hdl.handle.net/1721.1/36449 |
| work_keys_str_mv | AT yeboahamankwahsafroadukwadwo epitaxialsilicongrowthratecontrol |