Research on Polycrystalline Films for Micro- and Nano-Systems
Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films in these systems depend on nano-scale structure. In collaborative research with...
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| Format: | Article |
| Language: | en_US |
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2003
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| Online Access: | http://hdl.handle.net/1721.1/3670 |
| _version_ | 1826217872978870272 |
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| author | Thompson, Carl V. |
| author_facet | Thompson, Carl V. |
| author_sort | Thompson, Carl V. |
| collection | MIT |
| description | Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films in these systems depend on nano-scale structure. In collaborative research with a number of SMA Fellows, Associates, and students, our group is carrying out research focused on probing, modeling and controlling nano-scale structural evolution during both vapor-phase and solid-phase polycrystalline film formation. In particular, high-sensitivity in-situ and real-time stress measurements are being used to study atomic scale forces and to characterize structure formation and evolution at the nano-scale. In other collaborative research, the affects of controlled structure and multi-film architectures on properties, such as piezoelectric characteristics and electromigration-limited reliability, are being explored. Through these interrelated activities, basic principles of the science and engineering of nano-scale materials are emerging. |
| first_indexed | 2024-09-23T17:10:31Z |
| format | Article |
| id | mit-1721.1/3670 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T17:10:31Z |
| publishDate | 2003 |
| record_format | dspace |
| spelling | mit-1721.1/36702019-04-12T08:06:44Z Research on Polycrystalline Films for Micro- and Nano-Systems Thompson, Carl V. interconnects MEMS stress thin films Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films in these systems depend on nano-scale structure. In collaborative research with a number of SMA Fellows, Associates, and students, our group is carrying out research focused on probing, modeling and controlling nano-scale structural evolution during both vapor-phase and solid-phase polycrystalline film formation. In particular, high-sensitivity in-situ and real-time stress measurements are being used to study atomic scale forces and to characterize structure formation and evolution at the nano-scale. In other collaborative research, the affects of controlled structure and multi-film architectures on properties, such as piezoelectric characteristics and electromigration-limited reliability, are being explored. Through these interrelated activities, basic principles of the science and engineering of nano-scale materials are emerging. Singapore-MIT Alliance (SMA) 2003-11-10T20:18:14Z 2003-11-10T20:18:14Z 2003-01 Article http://hdl.handle.net/1721.1/3670 en_US Advanced Materials for Micro- and Nano-Systems (AMMNS); 315579 bytes application/pdf application/pdf |
| spellingShingle | interconnects MEMS stress thin films Thompson, Carl V. Research on Polycrystalline Films for Micro- and Nano-Systems |
| title | Research on Polycrystalline Films for Micro- and Nano-Systems |
| title_full | Research on Polycrystalline Films for Micro- and Nano-Systems |
| title_fullStr | Research on Polycrystalline Films for Micro- and Nano-Systems |
| title_full_unstemmed | Research on Polycrystalline Films for Micro- and Nano-Systems |
| title_short | Research on Polycrystalline Films for Micro- and Nano-Systems |
| title_sort | research on polycrystalline films for micro and nano systems |
| topic | interconnects MEMS stress thin films |
| url | http://hdl.handle.net/1721.1/3670 |
| work_keys_str_mv | AT thompsoncarlv researchonpolycrystallinefilmsformicroandnanosystems |