Solid State Thin Film Lithium Microbatteries
Solid state thin film lithium microbatteries fabricated by pulsed-laser deposition (PLD) are suggested. During deposition the following process parameters must be considered, which are laser energy and fluence, laser pulse duration, laser pulse frequency, target composition, background gasses, subst...
| Main Authors: | , , |
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| Format: | Article |
| Language: | en_US |
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2003
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| Online Access: | http://hdl.handle.net/1721.1/3672 |
| _version_ | 1826210081082966016 |
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| author | Shi, Z. Lü, L. Ceder, Gerbrand |
| author_facet | Shi, Z. Lü, L. Ceder, Gerbrand |
| author_sort | Shi, Z. |
| collection | MIT |
| description | Solid state thin film lithium microbatteries fabricated by pulsed-laser deposition (PLD) are suggested. During deposition the following process parameters must be considered, which are laser energy and fluence, laser pulse duration, laser pulse frequency, target composition, background gasses, substrate temperature, target-substrate distance and orientation. The effects of the variations of the process parameters can be obtained by measuring stoichiometry, thickness, phases and structure (grain size and texture), and stress of the deposited films. Electrochemical measurements will be conducted to test the microbattery properties through open-circuit voltage, charge-discharge cycling, cyclic voltammetry, and impedance analysis. |
| first_indexed | 2024-09-23T14:42:09Z |
| format | Article |
| id | mit-1721.1/3672 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T14:42:09Z |
| publishDate | 2003 |
| record_format | dspace |
| spelling | mit-1721.1/36722019-04-12T08:08:42Z Solid State Thin Film Lithium Microbatteries Shi, Z. Lü, L. Ceder, Gerbrand lithium microbatteries pulsed-laser deposition solid state thin films. Solid state thin film lithium microbatteries fabricated by pulsed-laser deposition (PLD) are suggested. During deposition the following process parameters must be considered, which are laser energy and fluence, laser pulse duration, laser pulse frequency, target composition, background gasses, substrate temperature, target-substrate distance and orientation. The effects of the variations of the process parameters can be obtained by measuring stoichiometry, thickness, phases and structure (grain size and texture), and stress of the deposited films. Electrochemical measurements will be conducted to test the microbattery properties through open-circuit voltage, charge-discharge cycling, cyclic voltammetry, and impedance analysis. Singapore-MIT Alliance (SMA) 2003-11-16T17:54:18Z 2003-11-16T17:54:18Z 2003-01 Article http://hdl.handle.net/1721.1/3672 en_US Advanced Materials for Micro- and Nano-Systems (AMMNS); 158436 bytes application/pdf application/pdf |
| spellingShingle | lithium microbatteries pulsed-laser deposition solid state thin films. Shi, Z. Lü, L. Ceder, Gerbrand Solid State Thin Film Lithium Microbatteries |
| title | Solid State Thin Film Lithium Microbatteries |
| title_full | Solid State Thin Film Lithium Microbatteries |
| title_fullStr | Solid State Thin Film Lithium Microbatteries |
| title_full_unstemmed | Solid State Thin Film Lithium Microbatteries |
| title_short | Solid State Thin Film Lithium Microbatteries |
| title_sort | solid state thin film lithium microbatteries |
| topic | lithium microbatteries pulsed-laser deposition solid state thin films. |
| url | http://hdl.handle.net/1721.1/3672 |
| work_keys_str_mv | AT shiz solidstatethinfilmlithiummicrobatteries AT lul solidstatethinfilmlithiummicrobatteries AT cedergerbrand solidstatethinfilmlithiummicrobatteries |