Solid State Thin Film Lithium Microbatteries

Solid State Thin Film Lithium Microbatteries

Solid state thin film lithium microbatteries fabricated by pulsed-laser deposition (PLD) are suggested. During deposition the following process parameters must be considered, which are laser energy and fluence, laser pulse duration, laser pulse frequency, target composition, background gasses, subst...

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Bibliographic Details
Main Authors: Shi, Z., Lü, L., Ceder, Gerbrand
Format: Article
Language:en_US
Published: 2003
Subjects:
lithium microbatteries
pulsed-laser deposition
solid state thin films.
Online Access:http://hdl.handle.net/1721.1/3672

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