Design, fabrication, and testing of a three-dimensional monolithic compliant six-axis nanopositioner
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.
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Formato: | Thesis |
Idioma: | eng |
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Massachusetts Institute of Technology
2007
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Acceso en liña: | http://hdl.handle.net/1721.1/36741 |