Design, fabrication, and testing of a three-dimensional monolithic compliant six-axis nanopositioner

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2006.

Detalles Bibliográficos
Autor Principal: Labuz, James (James R.)
Outros autores: Martin L. Culpepper.
Formato: Thesis
Idioma:eng
Publicado: Massachusetts Institute of Technology 2007
Subjects:
Acceso en liña:http://hdl.handle.net/1721.1/36741