Novel CMOS-Compatible Optical Platform

Novel CMOS-Compatible Optical Platform

A research synopsis is presented summarizing work with integration of Ge and III-V semiconductors and optical devices with Si. III-V GaAs/AlGaAs quantum well lasers and GaAs/AlGaAs optical circuit structures have been fabricated on Si using Ge/GeSi/Si virtual substrates. The lasers fabricated on bul...

Full description

Bibliographic Details
Main Authors: Pitera, Arthur J., Groenert, M. E., Yang, V. K., Lee, Minjoo L., Leitz, Christopher W., Taraschi, G., Cheng, Zhiyuan, Fitzgerald, Eugene A.
Format: Article
Language:en_US
Published: 2003
Subjects:
chemo-mechanical planarization
GaAs/AlGaAs lasers
GeSi virtual substrates
optical circuit
wafer bonding
Online Access:http://hdl.handle.net/1721.1/3714

Internet

http://hdl.handle.net/1721.1/3714

Similar Items