Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm
The validity of the dynamic analysis based on simplified plate model was investigated using of FE-codes ANSYS in the present paper. The simplified clamped multi-layered plate model was first verified by comparison with the exact model. The simply supported plate model was confirmed to be not a suita...
| Main Authors: | , |
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| Format: | Article |
| Language: | en_US |
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2003
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| Online Access: | http://hdl.handle.net/1721.1/3731 |
| _version_ | 1811090272889602048 |
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| author | Yao, Lin-Quan Lu, Li |
| author_facet | Yao, Lin-Quan Lu, Li |
| author_sort | Yao, Lin-Quan |
| collection | MIT |
| description | The validity of the dynamic analysis based on simplified plate model was investigated using of FE-codes ANSYS in the present paper. The simplified clamped multi-layered plate model was first verified by comparison with the exact model. The simply supported plate model was confirmed to be not a suitable model due to its large error as comparing with exact model. Influence of dimensions of laminar diaphragm on nature frequencies was studied. Deflection and voltage response driven by mechanical and electric loads were described. The optimized thickness ratio of PZT layer to SiO₂ and Si layers was given in the paper to obtain the best deflection export of actuator in design. |
| first_indexed | 2024-09-23T14:40:31Z |
| format | Article |
| id | mit-1721.1/3731 |
| institution | Massachusetts Institute of Technology |
| language | en_US |
| last_indexed | 2024-09-23T14:40:31Z |
| publishDate | 2003 |
| record_format | dspace |
| spelling | mit-1721.1/37312019-04-11T01:11:20Z Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm Yao, Lin-Quan Lu, Li piezoelectric diaphragm laminated plate nature frequency FEM The validity of the dynamic analysis based on simplified plate model was investigated using of FE-codes ANSYS in the present paper. The simplified clamped multi-layered plate model was first verified by comparison with the exact model. The simply supported plate model was confirmed to be not a suitable model due to its large error as comparing with exact model. Influence of dimensions of laminar diaphragm on nature frequencies was studied. Deflection and voltage response driven by mechanical and electric loads were described. The optimized thickness ratio of PZT layer to SiO₂ and Si layers was given in the paper to obtain the best deflection export of actuator in design. Singapore-MIT Alliance (SMA) 2003-11-29T19:51:27Z 2003-11-29T19:51:27Z 2003-01 Article http://hdl.handle.net/1721.1/3731 en_US Advanced Materials for Micro- and Nano-Systems (AMMNS); 255173 bytes application/pdf application/pdf |
| spellingShingle | piezoelectric diaphragm laminated plate nature frequency FEM Yao, Lin-Quan Lu, Li Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm |
| title | Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm |
| title_full | Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm |
| title_fullStr | Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm |
| title_full_unstemmed | Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm |
| title_short | Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm |
| title_sort | simplified model and numerical analysis of multi layered piezoelectric diaphragm |
| topic | piezoelectric diaphragm laminated plate nature frequency FEM |
| url | http://hdl.handle.net/1721.1/3731 |
| work_keys_str_mv | AT yaolinquan simplifiedmodelandnumericalanalysisofmultilayeredpiezoelectricdiaphragm AT luli simplifiedmodelandnumericalanalysisofmultilayeredpiezoelectricdiaphragm |