Characterization of Diamond-Like Film after Focused Ion Beam Processing

Characterization of Diamond-Like Film after Focused Ion Beam Processing

Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemic...

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Bibliographic Details
Main Authors: Fu, Yongqi, Ngoi, Kok Ann Bryan
Format: Article
Language:en_US
Published: 2003
Subjects:
DLC
FIBM
optical properties
XPS
Online Access:http://hdl.handle.net/1721.1/3736

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