A voltage-tunable microfabricated accelerometer

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992.

Bibliographic Details
Main Author: Lubratt, Mark Paul
Other Authors: Martin A. Schmidt and Jeffrey H. Lang.
Format: Thesis
Language:eng
Published: Massachusetts Institute of Technology 2007
Subjects:
Online Access:http://hdl.handle.net/1721.1/37497
Description
Summary:Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1992.